| 发明名称 |
PURIFIER INFORMATION RETRIEVAL SYSTEM |
| 摘要 |
<p>The present invention relates to the monitoring of contaminant concentrations in manufacturing processes that employ fluid purification devices. The invention provides a sensitive method for analyzing contaminant concentrations in a process fluid stream using purification material to adsorb contaminants contained therein over an entire process.</p> |
| 申请公布号 |
KR20050103946(A) |
申请公布日期 |
2005.11.01 |
| 申请号 |
KR20057015353 |
申请日期 |
2005.08.19 |
| 申请人 |
MYKROLIS CORPORATION |
发明人 |
SPIEGELMAN JEFFREY J.;ALVAREZ DANIEL JR.;TRAM ALLAN |
| 分类号 |
G01N;G01N1/22;G01N1/34;G01N1/44;G01N30/08;G01N30/12;G01N33/00;(IPC1-7):G01N33/00 |
主分类号 |
G01N |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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