| 摘要 |
THE INVENTION RELATES TO A METHOD FOR PRODUCING A THIN MEMBRANE, COMPRISING THE FOLLOWING STEPS: - IMPLANTING GAS SPECIES, THROUGH ONE SURFACE OF A FIRST SUBSTRATE (10) AND THROUGH ONE SURFACE OF A SECOND SUBSTRATE (20), WHICH IN SAID SUBSTRATES ARE ABLE TO CREATE MICROCAVITIES (11, 21) DELIMITING, FOR EACH SUBSTRATE, A THIN LAYER (13, 23) LYING BETWEEN THESE MICROCAVITIES AND THE IMPLANTED SURFACE, THE MICROCAVITIES BEING ABLE, AFTER THEIR IMPLANTATION, TO CAUSE DETACHMENT OF THE THIN LAYER FROM ITS SUBSTRATE; - ASSEMBLY OF THE FIRST SUBSTRATE (10) ONTO THE SECOND SUBSTRATE (20) SUCH THAT THEIR IMPLANTED SURFACES FACE ONE ANOTHER; - DETACHING EACH THIN LAYER (13, 23) FROM ITS SUBSTRATE (10, 20), THE THIN LAYERS REMAINING ASSEMBLED TOGETHER TO FORM SAID THIN MEMBRANE. THE INVENTION ALSO CONCERNS A THIN MEMBRANE STRUCTURE OBTAINED WITH THIS METHOD.
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