| 发明名称 |
PROXIMITY MENISCUS MANIFOLD |
| 摘要 |
An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus. |
| 申请公布号 |
SG115838(A1) |
申请公布日期 |
2005.10.28 |
| 申请号 |
SG20050002522 |
申请日期 |
2005.03.23 |
| 申请人 |
LAM RESEARCH CORPORATION |
发明人 |
CARL WOODS;MICHAEL G.R. SMITH;JOHN PARKS;JAMES P. GARCIA;JOHN M. DE LARIOS |
| 分类号 |
B05C9/02;B05D1/00;B05D3/12;H01L21/00;H01L21/02;H01L21/027;H01L21/304;H01L21/306 |
主分类号 |
B05C9/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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