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发明名称
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND COMPUTER PROGRAM
摘要
申请公布号
SG115669(A1)
申请公布日期
2005.10.28
申请号
SG20040001980
申请日期
2004.04.07
申请人
ASML NETHERLANDS B.V.
发明人
DAMS, JOHANNES ADRIANUS ANTONIUS THEODORUS;DE WEERDT, ROBRECHT EMIEL MARIA LEONIA
分类号
H01L21/027;G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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