LITHOGRAPHIC PROJECTION ASSEMBLY, LOAD LOCK AND METHOD FOR TRANSFERRING OBJECTS
摘要
申请公布号
SG115631(A1)
申请公布日期
2005.10.28
申请号
SG20040001159
申请日期
2004.03.09
申请人
ASML NETHERLANDS B.V.
发明人
KLOMP, ALBERT JAN HENDRIK;HOOGKAMP, JAN FREDERIK;VUGTS, JOSEPHUS CORNELIUS JOHANNES ANTONIUS;LIVESEY, ROBERT GORDON;FRANSSEN, JOHANNES HENDRIKUS GERTRUDIS
