| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for correcting magnifications and rotations of a scanning transmitted image and a transmitted image such that the same magnification and the same rotational angle can be obtained even if the observation of the scanning transmitted image is switched to that of the transmitted image, related to the method for correcting the magnifications and the rotations of the scanning transmitted image and the transmitted image, and a scanning transmission type electron microscope. SOLUTION: A scanning transmission type electron microscope is provided with an optical system in which images are formed on a sample by a scanning optical system, or sample images are formed in front of or behind the sample by irradiating electron beams in probe-shapes across the sample through a scanning optical system. The scanning transmission type electron microscope is configured to provide a magnification/rotational angle correction means 51 to obtain transmitted images with the same magnification/rotation angle based on images obtained by scanning transmitted images. COPYRIGHT: (C)2006,JPO&NCIPI
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