| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analysis method and device with optical axis adjusting function, capable of precisely performing optical axis adjustment, regardless of the direction of placing an optical axis adjusting halved sample. SOLUTION: Distribution measurement of X-ray intensity is performed at two arbitrary expected positions 31 and 32 of a diaphragm (X-ray analysis means) 5, while the halved sample S is rotated about its axis by aθ-stage 17 for each moving position of an r-stage 16, whereby the moving position of the r-stage 16 and the rotating angle of theθ-stage 17, where the reference line L of the halved sample S, is parallel to a diaphragm moving axis 36 are detected. According to this, since the state where the reference line L of the halved sample S passing the rotating center of theθ-stage 17 is parallel to the diaphragm moving axis 36 can be detected, regardless of the placement direction of the halved sample S on theθ-stage 17, the rotation center of theθ-stage 17 in the moving position of the r-stage 16 is made to match the expected position of the diaphragm, and the rotation center of theθ-stage 17 is further made to match with a measuring origin on an image, whereby optical axis adjustment can be performed accurately. COPYRIGHT: (C)2006,JPO&NCIPI
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