| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to regenerate an used quartz-glass-made fixture/tool conveniently. SOLUTION: The method of reprocessing quartz-glass-made fixture/tool comprises the steps of collecting waste products 20, e.g. quartz-glass-made fixtures/tools discarded by a user 10, or a semiconductor manufacturing company, by a sorting section 30, detecting impurities adhering to the fixture/tool, sorting the waste products 20 according to the types of impurity detected, and classifying them into groups corresponding to regeneration plants 40-1 to 40-7. The plants 40-1 to 40-7 corresponding to the types of the impurity receive the waste products 20 from the sorting section 30 and remove impurities adhering to the waste products 20 to regenerate the products. A shipping inspection and precision cleaning section 50 inspects regenerated products shipped by the individual plants 40-1 to 40-7 for impurities adhering to the products, carries out precision cleaning and ships the regenerated products to the user 10. COPYRIGHT: (C)2006,JPO&NCIPI
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