| 发明名称 |
AIR ACTUATOR, STAGE APPARATUS, ALIGNER, AND METHOD FOR MANUFACTURING DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an air actuator which is used as the driving source of a stage apparatus for the accurate movement and positioning of an electron beam exposure device or the like, and is capable of suppressing the quantity of gas to be used. <P>SOLUTION: The air actuator 10 to be used in a vacuum environment or a prescribed gas environment is provided with a high pressure gas supply source 30 for supplying high pressure gas A, and a high pressure gas circulator 40 for collecting the supplied high pressure gas A and sending the collected high pressure gas A to the high pressure gas supply source 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2005303117(A) |
申请公布日期 |
2005.10.27 |
| 申请号 |
JP20040118860 |
申请日期 |
2004.04.14 |
| 申请人 |
SUMITOMO HEAVY IND LTD;NIKON CORP |
发明人 |
SHIBUKAWA TAKASHI;YODA YASUSHI |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
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