| 摘要 |
PROBLEM TO BE SOLVED: To certainly control a liquefied fluid at a constant rate without stopping the flow of the liquefied fluid even when the pressure of the liquefied fluid is high. SOLUTION: A control unit 1 comprises: a cylindrical unit main body 3; an inlet side mouthpiece 7 which is mounted on the inlet side of the unit main body 3 so as to permit the liquefied fluid 5 to flow into the unit main body 3; a screw-shaped register 9 which is inserted in the interior of the unit main body 3 and has a groove portion 23 for controlling the flow rate of the liquefied fluid 5 at a constant value; an outlet side mouthpiece 11 which is mounted on the outlet side of the unit main body 3 so as to permit the liquefied fluid 5 to flow out of the unit main body 3; and a spacer pipe 13 which is fitted in the interior of the unit main body 3 between the outlet side mouthpiece 11 and the register 9 and has a flow path communicating with the groove portion 23 of the register 9 so as to allow the liquefied fluid 5 to flow out to the inner peripheral side. COPYRIGHT: (C)2006,JPO&NCIPI
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