发明名称 Process for producing a multilayer arrangement having a metal layer
摘要 Process for producing a multilayer arrangement having a metal layer, in which a metal layer is applied to a surface of a first wafer and at least one interlayer is applied to the metal layer. Furthermore, a second wafer is applied to the interlayer and then the first wafer is removed, so that the metal layer is uncovered.
申请公布号 US2005239272(A1) 申请公布日期 2005.10.27
申请号 US20040920043 申请日期 2004.08.16
申请人 INFINEON TECHNOLOGIES AG 发明人 RUTTKOWSKI EIKE;ILICALI GURKAN;LUYKEN RICHARD J.;HOFMANN FRANZ;BUENO MANUELA A.
分类号 B81C1/00;H01L21/768;(IPC1-7):H01L21/44 主分类号 B81C1/00
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