发明名称 ELECTROMAGNETIC FORCE ACTUATOR
摘要 An electromagnetic actuator apparatus that utilizes coolant fluid to remove heat generated by the actuator is described. The apparatus includes a solid base plate that is formed to house electrically conductive materials, such as wire loops. The solid base plate is a single piece of material that is formed with embedded channels. The conductive materials are situated within a cavity of the actuator apparatus within which the coolant fluid can flow over and remove heat from the conductive materials. A flow guide having vanes can be inserted into the cavity of an actuator apparatus to guide the flow of coolant fluid to efficiently cool the wire loops. An actuator array that includes multiple actuators is also described.
申请公布号 US2005236915(A1) 申请公布日期 2005.10.27
申请号 US20040831723 申请日期 2004.04.23
申请人 NIKON CORPORATION 发明人 PHILLIPS ALTON H.
分类号 G03F7/20;H02K1/20;H02K9/00;H02K9/19;H02K41/02;(IPC1-7):H02K9/00 主分类号 G03F7/20
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