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发明名称
SPIN COATER
摘要
申请公布号
KR20050102879(A)
申请公布日期
2005.10.27
申请号
KR20040028197
申请日期
2004.04.23
申请人
APPLIED LAB CO., LTD.
发明人
KANG, HEUNG SEOK;SUNG, DUG HYUNG;KIM, JU TAE
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
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地址
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