| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor capable of keeping its offset temperature characteristics satisfactorily. <P>SOLUTION: The semiconductor acceleration sensor is composed of a frame 1, consisting of a semiconductor substrate; an elastic beam 2 supported by the frame on the surface side of the frame 1; a weight section 3 supported by the beam 2 and acted by acceleration due to oscillation; a sensing element 4 formed on the surface side of the beam 2 and detecting deformation of the beam 2; an oxide film 5 disposed on the surface which is the side on which the sensing element 4 is formed; a protective film 6 disposed on an exposure surface of the oxide film 5; an electrode 7 for outputting a signal from the sensing element 4 to the outside; and a first film 8 made of a material identical to and has a thickness approximately equivalent to that of the protective film 6, and which is disposed on the exposure surface of the substrate, other than the surface whereon the protective film 6 is formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
