| 摘要 |
PROBLEM TO BE SOLVED: To improve the device characteristics in a surface acoustic wave device. SOLUTION: A surface acoustic wave device has a piezoelectric substrate 1, and an interdigital transducer 2 formed on a surface of the piezoelectric substrate 1. Grooves 5 for eliminating unwanted waves are formed in a back surface of the surface acoustic wave device, in such a manner that the interval of the adjoining grooves 5 is decreased so that the groove 5 extends from one end 7 to another end 8. With this arrangement, angles defined by the extending directions of the respective grooves and the propagating direction of the surface acoustic wave can be differentiated from each other, and the reflecting conditions of the unwanted waves with respect to respective grooves can be varied from each other, thereby the characteristics of the surface acoustic wave device are improved. COPYRIGHT: (C)2006,JPO&NCIPI |
