| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage apparatus capable of achieving small size and high vacuum. SOLUTION: A move guide apparatus is an apparatus for moving and positioning on a flat surface. The apparatus comprises a positioning table provided in a vacuum chamber, a rod extending to the outside of the vacuum chamber from the positioning table, and a movable mobile object which guides the movement of the rod in a travelling direction and is guided in a direction perpendicular to the travelling direction of the rod by a fixed member. Further, it comprises a linear motor which drives the rod and which is provided on the outside of the vacuum chamber and the linear motor for driving the mobile object for each rod. Such structure enables the precise movement of the mobile object since the mobile object is entirely kept in a non-contact state, the minituarization of the vacuum chamber, and the suppression of deterioration in the degree of vacuum caused by the movement and the like of a guide unit to the minimum since the guide unit and the drive unit for the mobile object are provided on the outside of a vacuum container. COPYRIGHT: (C)2006,JPO&NCIPI
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