| 摘要 |
PROBLEM TO BE SOLVED: To provide a synthetic quartz glass plate for an excimer UV lamp device, which is good and uniform in light extraction efficiency over the whole surface when it is used as a window material for the excimer UV lamp device. SOLUTION: The synthetic quartz glass plate for the excimer UV lamp device is formed from synthetic quartz glass synthesized by a flame hydrolysis method using a high purity silicon compound as a raw material. The synthetic quartz glass plate for the excimer UV lamp device emitting vacuum ultra-violet rays having wavelengths of 150-250 nm is characterized in that it is obtained by joining at least two synthetic quartz glass sheets by confronting mutual edge faces of the sheets, the total length of the outer peripheries of the plate after joining is≥2,700 mm, the thickness is 3-10 mm, the fluctuation width in thickness is≤1 mm, the bending of the plate by joining is≤3 mm, the birefringence at the joined part is≤80 nm/cm, the number of independent bubbles each having a major diameter of <1 mm and found in 100 mm square is≤10 pieces over the whole plate including the joined part, and no bubble formed by the conjunction of a plurality of bubbles and having a length of≥10 mm in total is contained. COPYRIGHT: (C)2006,JPO&NCIPI
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