| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece conveying device capable of preventing a trace from being left on a suction surface on the workpiece side when the workpiece is conveyed in a state that the workpiece is sucked and held by a workpiece holding means with negative pressure. SOLUTION: The workpiece holding means 13 can suck and hold the sheet shaped workpiece W to a workpiece holding surface 18 with the negative pressure, at least a part of the workpiece holding surface 18 is formed by a porous member 23 having fine continuous pores, and a negative pressure source is communicated to a back side of the porous member 23. COPYRIGHT: (C)2006,JPO&NCIPI
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