发明名称 Optical mems cavity having a wide scanning range for measuring a sensing interferometer
摘要 A method for measuring the cavity length of a remote sensing interferometer by locally replicating the state of the remote sensing interferometer by way of a local interferometer. The local interferometer is produced by micro-electromechanical micro machining techniques, thus obtaining a highly accurate and reliable fiber optic sensing at a cost comparable to electronic sensing devices.
申请公布号 US2005237538(A1) 申请公布日期 2005.10.27
申请号 US20040829980 申请日期 2004.04.23
申请人 BELLEVILLE CLAUDE 发明人 BELLEVILLE CLAUDE
分类号 G01B9/02;G01B11/02;G01J3/02;G01J3/26;G02B26/00;(IPC1-7):G01B11/02 主分类号 G01B9/02
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