TEST EQUIPMENT FOR IMAGE SENSOR

摘要

Test equipment for image sensor in which optical characteristics of an image sensor (DUT) are tested by inputting/outputting electric signals from a contact part to the input/output terminals of the image sensor while irradiating the light receiving surface of the image sensor (DUT) with light. The image sensor (DUT) gripped by means of a contact arm (315) is imaged through a first camera (326); relative position of the image sensor (DUT) to the contact part is recognized through image processing; alignment amount of the image sensor (DUT) is calculated from the relative position while considering a previously calculated shift of the optical axis of the image sensor (DUT) from the optical axis of a light source; a driving section (322) is driven according to the alignment amount; and under a state where a lock and free mechanism (318) is not locked, a grip side arm (317) in abutment with a movable stage (321) is moved.