| 摘要 |
PROBLEM TO BE SOLVED: To provide a synthetic quartz glass plate for an excimer UV lamp device, which is good in light extraction efficiency over the whole surface and realizes uniform irradiation energy density when it is used as a window material for the excimer UV lamp device. SOLUTION: The synthetic quartz glass plate for the excimer UV lamp device is formed from synthetic quartz glass synthesized by a flame hydrolysis method using a high purity silicon compound as a raw material. The synthetic quartz glass plate for the excimer UV lamp device emitting vacuum ultra-violet rays having wavelengths of 150-250 nm is characterized in that the total length of the outer peripheries of the plate is≥1,500 mm, the fluctuation width in thickness is≤1 mm, the warp is≤0.5%, the surface roughness Ra is≤50 nm, the birefringence is≤10 nm/cm, and no bubble having a major diameter of≥1 mm is contained. COPYRIGHT: (C)2006,JPO&NCIPI
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