| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface property measuring machine capable of finely adjusting and correcting a seating error generated when the surface property measuring machine is seated on a surface plate, by enabling light movement and rotation of the surface property measuring machine on the surface plate, even in the case of a work required to be measured from various directions. SOLUTION: This machine is equipped with a support means for supporting the surface property measuring machine in the floating state movably and rotatably in the two-dimensional direction parallel to the surface plate, and supporting the surface property measuring machine fixedly on the surface plate; and a fine adjustment means capable of finely adjusting position deviation of a detector to a measuring portion of the work, when the surface property measuring machine is seated and fixed on the surface plate after the surface property measuring machine is moved and rotated on the surface plate and the detector is positioned on the measuring portion of the work. COPYRIGHT: (C)2006,JPO&NCIPI
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