发明名称 Silver alloy film, flat panel display, and sputtering-target material used for forming the silver alloy film
摘要 Provided is a silver alloy film for which good properties of corrosion resistance, heat resistance and adhesiveness are required in thin-film electronic components such as a flat panel display, various semiconductor devices, a thin-film sensor and a magnetic head, a display device having the silver alloy film, and a sputtering-target material for forming the silver alloy film. The silver alloy film consists of, by atomic %, 0.1 to 1.0% Si, 0.1 to 0.7% in total of at least one element selected from the group consisting of Cu, Ti and Ge, and the balance of Ag and unavoidable impurities, wherein a total amount of all the additive elements to Ag is not more than 1.5%.
申请公布号 US2005238527(A1) 申请公布日期 2005.10.27
申请号 US20040832244 申请日期 2004.04.27
申请人 HITACHI METALS, LTD. 发明人 MURATA HIDEO
分类号 C22C5/06;(IPC1-7):C22C5/06 主分类号 C22C5/06
代理机构 代理人
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