发明名称 |
Metrology structure and methods |
摘要 |
A method of indicating the progress of a sacrificial material removal process, the method, comprising: Freeing a portion of a member, the member being disposed in a cage and laterally surrounded by the sacrificial material; and preventing the freed portion of the member from floating away by retaining the freed member.
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申请公布号 |
US2005236681(A1) |
申请公布日期 |
2005.10.27 |
申请号 |
US20040832367 |
申请日期 |
2004.04.27 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY L.P. |
发明人 |
POTOCHNIK STEPHEN J.;FAASE KENNETH J. |
分类号 |
B81C1/00;H01L23/58;(IPC1-7):H01L23/58 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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