摘要 |
PROBLEM TO BE SOLVED: To enhance magnetostatic characteristics of a magnetic film film-deposited on a base film. SOLUTION: When a non-magnetic under film and a magnetic film are successively layered on the base film F, the particle growth direction of the non-magnetic under film and the particle growth direction of the magnetic film are different from each other in the plane to the surface of the under film F and the magnetic film has 200 to 1,000Åthickness. Growth particles of the non-magnetic under film are continuously changed from the under film F side toward the surface from a dense state to a rough state and growth particles of the magnetic film are continuously changed from the non-magnetic under film side toward the surface from a rough state to a dense state. COPYRIGHT: (C)2006,JPO&NCIPI
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