| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor device capable of performing data reading or processing at high speed. SOLUTION: The displacement sensor device comprises a light emitting element for irradiating a measuring object with light at a predetermined angle; an imaging element for imaging the measuring object irradiated with light from another angle; a general measuring area setting means capable of setting a general measuring area within the visual field of the imaging element; a light receiving signal detection means detecting a light receiving signal distribution area of the measuring object from the set general measuring area; a follow-up measuring area setting means setting at least one follow-up measuring area including the detected light receiving signal distribution area and narrower than the general measuring area; a displacement measuring means performing an intended displacement measurement by measuring the follow-up measuring area; and an output means outputting a displacement measured by the displacement measuring means. COPYRIGHT: (C)2006,JPO&NCIPI
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