| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for the microflaws of a sheet material to be inspected, which is constituted so as to systematically check the whole surface of the sheet material, and also to provide a microflaw inspection method. SOLUTION: The inspection device for the microflaws of the sheet material to be inspected includes: a placing table; an irradiation light source; and a reflected light recording body for detecting the reflected light from the flaw of the sheet material for recording the same, and has a means for shaking at least one of: the material for taking the relatively different positional or angular relations among the material; the irradiation light source and the reflected light recording body; the placing table; the irradiation light source; and the reflected light recording body. The device also has a discrimination function for deciding and discriminating the flaws of the material from a plurality of the data recorded on the reflected light recording body under the relatively different positional or angular relations among the material, the irradiation light source, and the reflected light recording body. COPYRIGHT: (C)2006,JPO&NCIPI
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