| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detecting method capable of easily distinguishing stains from defects by solving the problem that it has been difficult to distinguish stains from defects by defect detecting methods by the prior art. SOLUTION: In the defect detecting method for illuminating a transparent-plate-like body and detecting defects in the transparent-plate-like body, a scattering means for scattering illumination light is provided for the surface of the transparent-plate-like body. The scattering means is illuminated to scatter and totally reflect the illumination light through the transparent-plate-like body and propagate the illumination light. The illumination light totally reflected and propagating through the transparent-plate-like body illuminates defects in the transparent-plate-like body. Light scattered by the defects is detected. COPYRIGHT: (C)2006,JPO&NCIPI
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