| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic supporting device capable of reducing influence of a control system of the other shaft and having satisfactory control performance even in a transient condition when controlling a position of a supported body supported from the directions of two x and y axes. SOLUTION: Computing devices 13d, 14d obtain a feed forward signal (a compensation value) based on position command signals Sx, Sy from x-axis and y-axis position command means 11a, 11b to compensate feedback control based on position detection signals Px, Py from position sensors 7, 8. For example, since a position controller 13 in the direction of x-axis obtains a feed forward signal based on the position command signals Sx, Sy with respect to two x- and y-axes, influence of the control system of y-axis which is the other axis can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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