| 摘要 |
PROBLEM TO BE SOLVED: To provide technique of regenerating an iridium plating solution in a manner as not to give rise to the loss of iridium in the plating solution without subjecting the iridium plating solution after use to intricate processes. SOLUTION: The method of regenerating the iridium plating solution comprises adding hydrohalic acid to the used iridium plating solution containing a halogen complex of iridium and heating the same. As the hydrohalic acid to be added at this time, the hydrohalic acid solution of 30 to 49wt% in concentration is preferably added to the plating solution at 1 to 500 mL per liter of the solution. Also, the heating temperature is preferably set at 40 to 100°C and the heating time at 4 to 50 hours. COPYRIGHT: (C)2006,JPO&NCIPI
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