METHOD OF MANUFACTURING TRICHLOROMONOSILANE

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive method of manufacturing trichloromonosilane. SOLUTION: In the method of manufacturing trichloromonosilane by reacting silicon particles with hydrogen chloride in a fluidized bed reactor, silicon dust produced as waste product in the manufacture of required silicon grains as the silicon particles from lumpy silicon is used and introduced directly to the reactor. COPYRIGHT: (C)2006,JPO&NCIPI