发明名称 Elimination of write head plating defects using high activation chemically amplified resist
摘要 Methods of forming a component of a thin film magnetic head and improving the plating of a component of a thin film magnetic head are provided. The methods include the use of a high activation energy chemically amplified photoresist (CARS) that is contacted with a low pH high saturation magnetic moment plating solution to form a magnetic head component that is essentially free of plating defects. The methods find utility in hard disk drive applications, such as in the manufacture of magnetic poles for the write head of a hard disk drive.
申请公布号 US2005239001(A1) 申请公布日期 2005.10.27
申请号 US20040831412 申请日期 2004.04.23
申请人 LEE KIM Y;MCKEAN DENNIS R 发明人 LEE KIM Y.;MCKEAN DENNIS R.
分类号 G03F7/039;G03F7/40;G11B5/187;G11B5/31;(IPC1-7):G11B5/187 主分类号 G03F7/039
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