发明名称 METHOD OF MANUFACTURE OF INTEGRATED OPTICAL DEVICES
摘要 A hybrid sol-gel material (30) is placed in optical contact with two optical surfaces (32,34) and the surfaces are precisely aligned as necessary to meet desired optical specifications. The sol-gel material filling the gap between the surfaces is then cured, such as by exposure to UV radiation. This allows, for example, the fabrication of a solid-spaced etalon filter (46,54) where the spacer layer (44,52) of the etalon is formed with sol-gel material (30) to a precise dimension defined by the alignment of the optical surfaces (32,34). The optical properties of the hybrid-glass structure formed between the optical surfaces may be fine tuned by varying the exposure of the sol-gel material to the curing agent. Furthermore, the hybrid-glass structure of the invention can be patterned using standard photolithographic techniques.
申请公布号 WO2005101117(A2) 申请公布日期 2005.10.27
申请号 WO2005US12160 申请日期 2005.04.08
申请人 CORONADO INSTRUMENTS, INC;SIDORIN, YAKOV 发明人 SIDORIN, YAKOV
分类号 G01J3/26;G02B5/28;G02B6/34;G03C1/492 主分类号 G01J3/26
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