| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve machining accuracy by performing the positional control of a laser irradiation head by correctly measuring the focus distance between the laser irradiation head of the laser beam machining system and the working surface of the work. <P>SOLUTION: The laser beam 4 from the laser oscillator 1 irradiates the working surface 3a of the work 3 from the laser irradiation head 5. The ultrasonic waves 10 generated when the laser beam 4 irradiates the work 3 is received by a plurality of ultrasonic wave detection means 8a, 8b. The focus distance Lf from the working surface 3a to the laser head 5 is determined from the detection signal from the ultrasonic wave detection means 8a, 8b and the irradiation timing of the laser beam 4, and the position control of the laser irradiation head 5 is performed so as to keep the focal distance between the working surface 3a and the laser irradiation head 5 constant based on the focus distance Lf. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
