LIGHT GUIDE TYPE SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To construct a smaller-sized analysis system by using a total-reflection absorption spectroscopy. SOLUTION: A detection domain 130 is provided adjacently to a mode field size conversion domain 120. A light guide comprising a silicon thin-line core 105 is constructed in the detection domain 130. A thin silicon oxide film 106 of a film thickness on the order of 20 to 30 nm is formed on an upper surface of the thin-line core 105. The thin-line core 105 has a cross section size of 500 nm in width and 150 nm in height. The thin-line core 105 is disposed on an embedded oxide layer 112 of an SOI substrate in the detection domain 130. COPYRIGHT: (C)2006,JPO&NCIPI