| 摘要 |
PROBLEM TO BE SOLVED: To reduce a phase delay included in a detection signal acquired from a detection system of a physical behavior of a detection object via a signal processing system, and to reduce sufficiently uncertainty of a detection value even in a nano-in-process. SOLUTION: A detector 3 detects a physical quantity X working to an objective tip part from the outside when the objective tip part is scan-traveled along the specimen surface, and outputs a detection signal x(X). A signal processing part 4 performs signal processing of the detection signal and extracts significant information of undulations in the nanometer order on the specimen surface, over a frequency band from a fundamental wave of a change of the detection signal to a prescribed frequency occupied by its harmonic component. A phase advance means 5 for compensating a time delay of a signal generated by the detector 3 and the signal processing part 4 is provided in a prescribed range of the frequency band of the detection signal x(X) on the subsequent stage of the signal processing part 4. COPYRIGHT: (C)2006,JPO&NCIPI
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