| 摘要 |
PROBLEM TO BE SOLVED: To prevent thermal strain in the measuring axis direction of a scale, and simultaneously to realize high mounting accuracy in the thickness direction of a scale plate. SOLUTION: The scale 1 is equipped with the scale plate 3 where a gradation 5 extending in the measuring axis direction is formed, and a support 4 for supporting it. As for the scale plate 3, one end in the measuring axis direction is supported by the support through a fixed support part 6, and the other end is supported by the support 4 through an elastic support part 6. The fixed support part 6 defines the distance between the support 4 and the scale plate 3 by fixed spacers 61, 62 projecting from the support 4 toward the scale plate 3. Elastic support parts 7, 8 define the distance between the support 4 and the scale plate 3 by movable spacers 72, 82 projecting from the support 4 toward the scale plate 3. COPYRIGHT: (C)2006,JPO&NCIPI
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