发明名称 ULTRASONIC CLEANER AND ULTRASONIC CLEANING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an ultrasonic cleaner capable of making the distribution of an amount of a cleaning liquid jetted to an article to be cleaned from a nozzle port uniform and enhancing cleaning efficiency. SOLUTION: In the ultrasonic cleaner, a nozzle 2 has protrusions 11a to 11c agitating the cleaning liquid supplied from jet ports 7a to 7c served as a supply port and heading to the nozzle port 3. The cleaning liquid jetted from the jet ports 7a to 7c collides with the protrusions 11a to 11c to change a flow direction. As a result of this, the flow of the cleaning liquid to the nozzle port 3 is disturbed to receive an agitation action by the protrusions 11a to 11c. Therefore, the appearance of the supply unevenness of the cleaning liquid from the nozzle port 3 to the article to be cleaned is prevented. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005296884(A) 申请公布日期 2005.10.27
申请号 JP20040119895 申请日期 2004.04.15
申请人 SHARP CORP 发明人 YAMAMOTO HIROYUKI
分类号 B08B3/12;B06B1/02;H01L21/304;(IPC1-7):B08B3/12 主分类号 B08B3/12
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