| 摘要 |
A microswitch comprises a deformable membrane (12) including two substantially parallel flexure arms (13), attached to a substrate via at least one end thereof and comprising thermal actuating means (4). An elongated contact arm (14), substantially parallel with the flexure arms (13), is arranged therebetween and attached thereto at the high deformation areas thereof. The contact arm (14) moves in a direction substantially parallel to the substrate upon actuation of the microswitch, and comprises electrostatic holding electrodes (15) and a conducting pad (6). |
