| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize an XY stage which allows pitching in an X direction and a Y direction to be suppressed without mounting additional elements on a slider. <P>SOLUTION: The XY stage for controlling movement of the slider in the X direction and the Y direction by an X-axis motor and a Y-axis motor is provided with a pitching suppression means which corrects an offset current caused to flow to a coil of the Y-axis motor or the X-axis motor during movement in the X or Y direction of the slider. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
