OPTICAL CONTROL INDICATION SYSTEM, OPTICAL CONTROL INDICATION METHOD, CONTROL METHOD, EXPOSURE DEVICE, AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical control indication system and a method of the same analytically evaluating the aberration balance of the entire images in an imaging optical system and automatically selecting a control optical member.

SOLUTION: The system and method comprise: aberration evaluation processes (S31 to S33) for evaluating the aberration in the imaging optical system using an aberration polynominal set as functions of field coordinates and eye coordinates in the imaging optical system based on information on a wave aberration in the imaging optical system obtained of a plurality of points on the field of the imaging optical system; a member selection process (S34) for selecting a control optical member to be optically controlled based on the information on the coefficient of the aberration polynominal obtained in the aberration evaluation process; and a controlled amount calculation process (S35) for calculating the controlled amount of the control optical member based on the information on the wave aberration.

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