| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that in the conventional scanning type exposure system, the distribution of incident angle (effective light source) on an exposure plane after scanning seems to become different from that in still state, however, an effective light source that can be measured by a conventional method is one only in still state and no influence of scanning in the scanning type exposure system is taken into account. <P>SOLUTION: The scanning type exposure system is provided with an outgoing (incident) light beam angle measuring means to measure an aperture diaphragm that limits an exposure surface or its adjacent exposure area by a desired position and size, as well as the illumination distribution of a surface that is moved by a specified quantity in the optical axial direction from the exposure surface limited by the aperture diaphragm or the exposure surface, and to measure the angle characterisitic of the outgoing (incident) light beam in the limited exposure area. The aperture diaphragms are set at a plurality positions arranged linearly in the scanning direction in the exposure surface or in the vicinity of the exposure surface, so as to measure the outgoing (incident) angle characterisitic at the respective positions, and then an operating means is provided to integrate the measured result. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
