| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detecting method which enables the easy distinguishment of stains from defects by solving the problem that it has been difficult to distinguish stains from defects by conventional defect detecting methods using light transmitted through a plate-like body and light reflected its surface. SOLUTION: In the defect detecting method for detecting defects through the use of light transmitted through a transparent-plate-like body, both the center of illumination light and the optical center of a detector are arranged on a straight line, and a light shielding body for shielding illumination light is provided on an optical axis. A CCD camera is used as the detector and focused on the transparent-plate-like body to measure changes in the luminance of light passing outside the light shielding body and detect defects. COPYRIGHT: (C)2006,JPO&NCIPI
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