发明名称 HEAT-RESISTANT PHOTOSENSITIVE RESIN COMPOSITION, PROCESS FOR PRODUCING PATTERN FROM THE COMPOSITION, AND ELECTRONIC PART
摘要 <p>A heat-resistant photosensitive resin composition which comprises (A) a polymer having an acidic functional group and/or a substituent derived therefrom, (B) a compound having at least one substituent derived from an amine-derived functional group, (C) a photoreactive compound, and (D) a solvent. Due to this constitution, the composition gives a cured film having satisfactory properties. A pattern having satisfactory resolution can be produced from this photosensitive resin composition, and a high-quality electronic part can be provided with the pattern.</p>
申请公布号 WO2005101125(A1) 申请公布日期 2005.10.27
申请号 WO2004JP04666 申请日期 2004.03.31
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD.;KOMATSU, HIROSHI;FUJIEDA, NAGATOSHI;NAKANO, HAJIME 发明人 KOMATSU, HIROSHI;FUJIEDA, NAGATOSHI;NAKANO, HAJIME
分类号 C08G73/10;C08G73/22;G03F7/023;G03F7/037;G03F7/038;(IPC1-7):G03F7/037 主分类号 C08G73/10
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