发明名称 |
HEAT-RESISTANT PHOTOSENSITIVE RESIN COMPOSITION, PROCESS FOR PRODUCING PATTERN FROM THE COMPOSITION, AND ELECTRONIC PART |
摘要 |
<p>A heat-resistant photosensitive resin composition which comprises (A) a polymer having an acidic functional group and/or a substituent derived therefrom, (B) a compound having at least one substituent derived from an amine-derived functional group, (C) a photoreactive compound, and (D) a solvent. Due to this constitution, the composition gives a cured film having satisfactory properties. A pattern having satisfactory resolution can be produced from this photosensitive resin composition, and a high-quality electronic part can be provided with the pattern.</p> |
申请公布号 |
WO2005101125(A1) |
申请公布日期 |
2005.10.27 |
申请号 |
WO2004JP04666 |
申请日期 |
2004.03.31 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD.;KOMATSU, HIROSHI;FUJIEDA, NAGATOSHI;NAKANO, HAJIME |
发明人 |
KOMATSU, HIROSHI;FUJIEDA, NAGATOSHI;NAKANO, HAJIME |
分类号 |
C08G73/10;C08G73/22;G03F7/023;G03F7/037;G03F7/038;(IPC1-7):G03F7/037 |
主分类号 |
C08G73/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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