CHUCK FOR SPIN COATER, METHOD OF MANUFACTURING VAPOR DEPOSITION MASK AND METHOD OF MANUFACTURING ORGANIC EL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a chuck for a spin coater suitable for supporting a body to be treated which has a resist layer formed also on the rear surface, a method of manufacturing a vapor deposition mask using the same and a method of manufacturing an organic EL device. SOLUTION: The chuck for the spin coater is used for the spin coater, holds the body W to be treated and is provided with a chuck main body 2 connected to the spin coater and a holding part 3 for holding only the outer peripheral part of the body W to be coated in such a manner that at at least the bottom surface side of the peripheral part is supported. The holding part 3 is provided to be projected from the upper surface side of the chuck main body 2. COPYRIGHT: (C)2006,JPO&NCIPI