发明名称 |
A HARD, WEAR-RESISTANT ALUMINUM NITRIDE BASED COATING |
摘要 |
A hard, wear-resistant aluminum nitride based coating of composition Alx SiyMezN is proposed; x, y and z denote atomic fractions, the sum of which is between 0.95 and 1.05, and wherein Me is a metal dopant of group III to VIII and Ib transition metals or a combination thereof. The metal provides, during the coating process, an intrinsic electrical conductivity higher than the coating without the metal doping. The silicon content is in between 0.01 <= y <= 0.4 and the content of the metal dopant or dopants Me is 0.001 <= z <= 0.08, preferably 0.01 <= z <= 0.05 and most preferably 0.015 <= z <= 0.045. |
申请公布号 |
WO2005100635(A1) |
申请公布日期 |
2005.10.27 |
申请号 |
WO2005EP03974 |
申请日期 |
2005.04.18 |
申请人 |
PIVOT A.S.;CODDET, OLIVIER;JILEK, MOJMIR;MORSTEIN, MARCUS;SIMA, MICHAL |
发明人 |
CODDET, OLIVIER;JILEK, MOJMIR;MORSTEIN, MARCUS;SIMA, MICHAL |
分类号 |
C23C14/02;C23C14/06;C23C14/32;C23C14/35;C23C30/00 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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