An optical imaging device for visually inspecting an optical ele ment is described. The optical imaging device comprises an optical connector interface adapted for connecting the optical imaging device to the optical element, an imaging unit adapted for acquiring image data of the optical element's surface, and a display forvisualizing the image data. The optical imaging device further comprises a focus evaluation facility adapted for deriving a focus evaluation value indicating the instantaneous image definition of the acquired image, said focus evaluation value being derived from at least one of: the acquired image data itself and additional signals related to the position of the imaging unit relative to the surface of the optical element. The focus evaluation value is usable as a focussing aid for either automatically or manually adjusting the focus.
申请公布号
WO2005100943(A1)
申请公布日期
2005.10.27
申请号
WO2004EP50545
申请日期
2004.04.16
申请人
AGILENT TECHNOLOGIES, INC.;JAHN, ROBERT;BELLER, JOSEF;HOFFMANN, PETER