| 摘要 |
<p>The method involves using detected phase errors of a computer generated hologram (1) for calibration of a measurement system in which the computer generated hologram is initiated. Data for description of the hologram and data of computer generated hologram brands (2) are converted to exposure data. Positions of the brands are determined by means of measuring instrument, and compared with a target. An independent claim is also included a holographic diffraction grating, in particular a computer-generated holographic diffraction grating, which is applicable for measuring purposes as holographic-optical element.</p> |
