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发明名称
Regelung kritischer Abmessungen
摘要
申请公布号
DE69921383(T2)
申请公布日期
2005.10.27
申请号
DE19996021383T
申请日期
1999.03.22
申请人
INFINEON TECHNOLOGIES AG
发明人
GRASSMANN, ANDREAS
分类号
H01L21/027;G03F7/20;(IPC1-7):G03F7/20
主分类号
H01L21/027
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代理人
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