| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method for specifying the fault location of a semiconductor device which can specify a fault in function during scanning test of the semiconductor device. SOLUTION: The system for specifying the fault location of a semiconductor device is provided with a testing jig 9 to be connected with a semiconductor device 2, an light emission observation device 11 which is placed opposite to the semiconductor device 2 and observes a light emission phenomena occurring at the fault location of the semiconductor device 2, an emission coordinates recorder 12 which is connected with the light emission observation device 11 and records the emission phenomena, while corresponding it with the two-dimensional coordinates of the semiconductor device 2, and an emission controller 8 which is connected to storage devices 21a to 21c and the testing jig 9, reads out test data corresponding with emission test parameters 7 from the storage devices 21a to 21c, and executes the generated emission observation test program. COPYRIGHT: (C)2006,JPO&NCIPI
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